05/04/2023
A presentation from our research group at the Arizona State University Physics Undergraduate Research Symposium by Abbie Elison, Cornell Engineering Class of 2026.
TITLE
Angular Dependence of Surface Energy with Crystal Directions of LiNbO3 (110) for Nano-Bonding to Si and α-quartz SiO2
AUTHORS
Abbie Elison , M. Sahal, S. Prakash, S. Swaminathan, R. Rane, B. Baker, S.R. Narayan, J. Kintz, L. Puglisi , R.J. Culbertson , N. Herbots
ABSTRACT
- LiNbO3 is a piezo-electric that, when mono-lithically integrated to Si-based materials, yields voice activated chips.
Current bonding methods include hetero-epitaxy and Direct Wafer Bonding (DWB). However, hetero-epitaxy causes lattice strain, since the lattice constant of LiNbO3 is heavily mismatched with Si (100) and α-quartz SiO2 (100). Thermal expansion mismatch during DWB causes fractures of LiNbO3. Also, LiNbO3 decomposes into Li2O5 and Li+ at T > 493K. Instead, this work uses Nano-BondingTM, /1/ (NB) and Surface Energy Engineering to modify surface energies into ‘far-from-equilibrium’ states so that when nano-contacted, a 2D-precursor phase forms to catalyze bonding.
Three Liquid Contact Angle Analysis (3LCAA) can map different angular directions on 6” LiNbO3 (110), Si (100), and α-quartz SiO2 (100) wafers. Water contact angles are found to vary significantly, by 50%, from 41.8 ± 1.5° to 59.8 ± 1.5°, as a function of crystal direction. Correlation between surface structure and surface energies along different crystal directions will be discussed.
/1/Herbots et al. US Pat. 6613677 (2003), 7,851,365 (2010), 9,018,077 (2015), 9,589,801 (2017), pend. (2020)
PRESENTER BIOGRAPHY
As of Spring 2023, Abbie Elison is a Cornell Scholar, and engineering sophomore at Cornell University. She gave the above presentation when she was a graduating senior at BASIS Peoria High School Class of 2021. She had been conducting research with Professor Herbots' research team since Fall 2019, learning laboratory techniques such as clean-room methods and three liquid contact angle analysis. After the COVID-19 lockdown, Abbie focused her research effort on Nano-Bonding€ (room temperature Direct Wafer Bonding) of Piezo-electrics On Silicon (PiezoOnSi). During the pandemic, s
he built her own clean room and laminar flow hood at home to continue experiments for surface energy analysis.
She presented her research progress in a poster at the virtual American Physical Society 4 Corners (APS-4C) Meeting in October 2020 and in an oral presentation at the virtual APS March 2021 Meeting. She won second place in Materials Science at the 2021 Arizona Science & Engineering Fair. She has an abstract accepted at the 2021 Annual Meeting of the American Vacuum Society.
Abbie is presently conducting her BASIS Peoria Senior Research Project and writing her first scholarly article on PiezoOnSi.
TITLE: Angular Dependence of Surface Energy with Crystal Directions of LiNbO3 (110) for Nano-Bonding to Si and α-quartz SiO2AUTHORS Abbie Elison , M. Sahal, ...